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MEMS And Reliability

Veryst Engineering provides world leading expertise in MEMS and reliability. Veryst possesses a cumulative industry experience exceeding 50 years in the fields of yield, reliability, and failure analysis, with more than 25 of those years in the MEMS world.


Veryst Engineering consultants include world-recognized experts in MEMS reliability with more than 25 years’ industry experience in the reliability of MEMS products in various use environments, including stringent automotive safety, space environments, consumer electronics, and games. Ms. Allyson Hartzell is a co-author of the book MEMS Reliability of the MEMS Reference Shelf from Springer Science and Business Media. Prior to her years in the MEMS world, she worked 15 years in semiconductor reliability developing a strong base in yield, failure analysis, and reliability. Veryst consultants include additional experts in MEMS simulation, reliability, and testing.

Veryst’s experience with different MEMS products includes: accelerometers, tilt sensors, gyroscopes, optical micro-mirrors, microphones, micro solid oxide fuel cells, switches, display technology, and medical devices. New MEMS technologies are being developed daily, and reliability is key to acceptance in the marketplace. Proper methodologies for testing and evaluation are essential to predicting MEMS product lifetimes, playing a role in all stages of commercialization from the engineering design phase all the way to product release.

Natural frequency of 1-micrometer resonator can be altered by molecular layer of water

Areas of MEMS consulting include:

  • Yield of new technologies' processes

  • Failure analysis to determine physics of failure in yield and reliability

  • Analytical chemistry and materials science expertise in failure analysis

  • Micro-contamination (both molecular and particulate)

  • Manufacturing environment (cleanroom expertise)

  • Package and solder reliability 

  • Early integration of packaging

  • Long term reliability testing and determining acceleration factors

  • Design of reliability testing, design of test fixtures, production of test fixtures

    • Testing can be performed at Veryst or at client

  • Simulation of MEMS devices and operation

    • Stiction, creep, fatigue, lubrication, thermal stresses

    • Microfluidics

    • Multiphysics

Veryst provides experience with advanced analytical techniques including:

  • SEM (Scanning Electron Microscopy)
  • EDS (Energy-Dispersive X-Ray Analysis)
  • WDX (Wavelength Dispersive X-Ray Analysis)
  • TEM (Transmission Electron Microscopy)
  • AFM (Atomic Force Microscopy)
  • Auger Analysis, XPS (X-Ray Photoelectron Spectroscopy)
  • FTIR (Fourier Transform Infrared Spectroscopy)
  • Ion Chromatography
  • Gas Chromatography/Mass Spectroscopy
  • Confocal Microscopy
  • Dynamic Holographic Microscopy
  • Scanning Vibrometry and Interferometry
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